DocumentCode
2935166
Title
Flying Height Measurement Metrology For Ultra-low Spacing In Rigid Magnetic Recording
Author
Li, Yufeng ; Menon, Aric
Author_Institution
Samsung Information Systems America
fYear
1995
fDate
10-12 July 1995
Keywords
Ellipsometry; Information systems; Magnetic recording; Metrology; Optical interferometry; Optical materials; Performance evaluation; Pollution measurement; Testing; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetic Recording Conference 1995. Magnetic Recording Heads., Digest of the
Conference_Location
Pittsburgh, PA, USA
Type
conf
DOI
10.1109/MRC.1995.658257
Filename
658257
Link To Document