DocumentCode :
2935166
Title :
Flying Height Measurement Metrology For Ultra-low Spacing In Rigid Magnetic Recording
Author :
Li, Yufeng ; Menon, Aric
Author_Institution :
Samsung Information Systems America
fYear :
1995
fDate :
10-12 July 1995
Keywords :
Ellipsometry; Information systems; Magnetic recording; Metrology; Optical interferometry; Optical materials; Performance evaluation; Pollution measurement; Testing; Wavelength measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Magnetic Recording Conference 1995. Magnetic Recording Heads., Digest of the
Conference_Location :
Pittsburgh, PA, USA
Type :
conf
DOI :
10.1109/MRC.1995.658257
Filename :
658257
Link To Document :
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