DocumentCode
2935361
Title
Development of a Linear Micro Inductosyn Sensor
Author
Dinulovic, D. ; Hermann, D. ; Fluegge, J. ; Gatzen, H.
Author_Institution
Hanover Univ., Garbsen
fYear
2006
fDate
8-12 May 2006
Firstpage
135
Lastpage
135
Abstract
Incremental inductive systems with interpolation capabilities allow lend themselves for miniaturization. The goal is the development of an inductive micro position measuring system principally based on the "inductosyn" principle and its fabrication in thin film fabrication technology. Inductive measuring systems in thin film technology feature a large degree of integration, miniaturization, and low manufacturing costs.
Keywords
Permalloy; coils; copper; electromagnetic induction; interpolation; micropositioning; microsensors; thin films; Ni81Fe19-Cu; incremental inductive systems; inductive microposition measuring system; interpolation; linear micro inductosyn sensor; low manufacturing costs; miniaturization; thin film fabrication; Coils; Distortion measurement; Fabrication; Interpolation; Magnetic flux; Magnetic materials; Manufacturing; Position measurement; Soft magnetic materials; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 2006. INTERMAG 2006. IEEE International
Conference_Location
San Diego, CA
Print_ISBN
1-4244-1479-2
Type
conf
DOI
10.1109/INTMAG.2006.375635
Filename
4261569
Link To Document