DocumentCode
2935592
Title
Preparation and Characterization of Zn0.96Mn0.04O film on Si (100) with a high Tc.
Author
Park, S. ; Kim, P. ; Lee, Y. ; Kim, T. ; Kang, J.
Author_Institution
Hanyang Univ., Seoul
fYear
2006
fDate
8-12 May 2006
Firstpage
146
Lastpage
146
Abstract
In this study, we report the preparation of a high-textured Zn0.96Mn0.04O1-delta film with a high TC where delta is the oxygen vacancy, by UHV reactive co-sputtering onto a natively oxidized Si (100) wafer, and the dependence of magnetism on the oxygen vacancy, controlled by the oxygen partial pressure (PO 2) during growth.
Keywords
Curie temperature; II-VI semiconductors; manganese compounds; semiconductor thin films; semimagnetic semiconductors; sputter deposition; vacancies (crystal); zinc compounds; Si; UHV reactive co-sputtering; Zn0.96Mn0.04O; high temperature; high-textured film; materials preparation; oxygen partial pressure; oxygen vacancy; Magnetic field measurement; Magnetic films; Magnetic semiconductors; Physics; Rough surfaces; Semiconductor films; Superconducting magnets; Surface roughness; Temperature sensors; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 2006. INTERMAG 2006. IEEE International
Conference_Location
San Diego, CA
Print_ISBN
1-4244-1479-2
Type
conf
DOI
10.1109/INTMAG.2006.375646
Filename
4261580
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