Title :
Delamination from process induced sources
Author :
Cheung, Annette Teng
Author_Institution :
Sch. of Eng., Hong Kong Univ. of Sci. & Technol., Hong Kong
Abstract :
Former studies on delamination have seldom addressed the issue of delamination caused by contamination in terms of what the contaminants are and where they originate. It is however imperative that process engineers involved in the assembly of electronic packaging understand these problems so they can minimize yield loss and reject rates. With the aid of time-of-flight secondary ion mass spectrometry (TOF-SIMS), five delaminated units from different Asian factories were all diagnosed to be contaminated with polydimethylsiloxane (PDMS). PDMS is a widely used chemical agent that has extremely low surface tension and viscosity, which makes it very mobile on surfaces. Possible sources of PDMS from materials used in the assembly line are identified by TOF-SIMS in this paper. The ability of PDMS to transfer to wafer surfaces is revealed by TOF-SIMS analysis. Also, PDMS can cause delamination in molded units as checked with the aid of scanning acoustic microscopy
Keywords :
acoustic microscopy; assembling; delamination; packaging; secondary ion mass spectra; surface contamination; time of flight mass spectra; PDMS; TOF secondary ion mass spectrometry; TOF-SIMS analysis; assembly; chemical agent; delamination; electronic packaging; molded units; polydimethylsiloxane; process induced sources; reject rates minimisation; scanning acoustic microscopy; surface contamination; time-of-flight mass spectrometry; wafer surfaces; yield loss minimisation; Assembly; Chemicals; Delamination; Electronics packaging; Mass spectroscopy; Microscopy; Production facilities; Surface contamination; Surface tension; Viscosity;
Conference_Titel :
Electronic Components and Technology Conference, 1999. 1999 Proceedings. 49th
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-5231-9
DOI :
10.1109/ECTC.1999.776276