Analysis Image of Multiplayer Thin Films

Author

Li Jing ; Weng Guirong

Author_Institution

Sch. of Mechanic & Electron. Eng., Soochow Univ., Suzhou, China

fYear

2010

fDate

19-21 June 2010

Firstpage

1

Lastpage

3

Abstract

According to the microstructure´ characteristics of multi player thin film materials images under AFM, SEM and TEM, mathematical morphology and theories of non-local algorithm were used in image processing of multiplayer thin films, including noise reduction, enhancement, fusion and object segmentation. Through analysis of multiplayer thin films´ surface microstructure, thin films images were improved. Some suggestions are put forward to regulate technological parameters of multiplayer thin films. The experiment shows that this processing method is effective and feasible, and image quality can be improved greatly.

Keywords

atomic force microscopy; image enhancement; image fusion; image segmentation; scanning electron microscopy; surface structure; thin films; transmission electron microscopy; atomic force microscopy; image enhancement; image fusion; image processing; image quality; mathematical morphology; multiplayer thin film materials images; noise reduction; object segmentation; scanning electron microscopy; surface microstructure; transmission electron microscopy; Algorithm design and analysis; Atomic force microscopy; Image analysis; Image processing; Microstructure; Noise reduction; Pixel; Scanning electron microscopy; Surface morphology; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Photonics and Optoelectronic (SOPO), 2010 Symposium on

Conference_Location

Chengdu

Print_ISBN

978-1-4244-4963-7

Electronic_ISBN

978-1-4244-4964-4

Type

conf

DOI

10.1109/SOPO.2010.5504184

Filename

5504184