Title :
Formation of the multilayered Co/Pd nanowire array by atomic image projection electron beam lithography (AIPEL) and the magnetic anisotropy
Author :
Lee, T. ; Wi, J. ; Hong, D. ; Shin, K. ; Kim, K.
Author_Institution :
Seoul Nat. Univ., Seoul
Abstract :
Multilayered Co/Pd nanowire array were obtained from atomic image projection electron beam lithography (AIPEL) and combined novel etching technique using amorphous Si layer. The role of dipolar interaction in magnetic anisotropy of the nanowire array was studied. The structural information were obtained by HR-TEM, XRD, SEM and AFM. The magnetic properties were measured by SQUID and vibrating sample magnetometry.
Keywords :
atomic force microscopy; cobalt; electron beam lithography; etching; exchange interactions (electron); ferromagnetic materials; magnetic anisotropy; magnetic multilayers; nanowires; palladium; scanning electron microscopy; transmission electron microscopy; AFM; Co-Pd; SEM; SQUID; TEM; XRD; amorphous layer; atomic image projection electron beam lithography; dipolar interaction; etching; magnetic anisotropy; multilayered nanowire array; vibrating sample magnetometry; Amorphous materials; Atomic beams; Atomic layer deposition; Atomic measurements; Electron beams; Etching; Lithography; Magnetic anisotropy; Magnetic properties; X-ray scattering;
Conference_Titel :
Magnetics Conference, 2006. INTERMAG 2006. IEEE International
Conference_Location :
San Diego, CA
Print_ISBN :
1-4244-1479-2
DOI :
10.1109/INTMAG.2006.375869
