Electromagnetic micro power generator on Silicon for wireless sensor nodes

Author

Kulkarni, S. ; Roy, S. ; Donnell, T.O. ; Beeby, S. ; Tudor, J.

Author_Institution

Tyndall Nat. Inst., Cork

fYear

2006

fDate

8-12 May 2006

Firstpage

317

Lastpage

317

Abstract

This paper discusses design, simulation and batch-fabrication steps for two electromagnetic power generators, where design 1 consists of two oppositely polarized vibrating Co₅₀Pt₅₀ face centered tetragonal phase (fct) hard magnets, between two sets of copper coils electroplated on silicon wafers and design 2 consists of Co₅₀Pt₅₀ magnets vibrating between copper coils electroplated over a soft magnetic, Ni₄₅Fe₅₅, layer. The volume of the device is about 43mm³.

Keywords

cobalt alloys; electric generators; electromagnetic devices; iron alloys; nickel alloys; permanent magnets; platinum alloys; power supplies to apparatus; silicon; soft magnetic materials; Co₅₀Pt₅₀; Ni₄₅Fe₅₅; copper coils; electromagnetic micropower generator; electroplating; face centered tetragonal phase; hard magnets; polarized vibration; silicon wafers; soft magnetic layer; wireless sensor nodes; Coils; Copper; Electromagnetic wave polarization; Iron; Magnetic sensors; Magnets; Power generation; Silicon; Soft magnetic materials; Wireless sensor networks;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 2006. INTERMAG 2006. IEEE International

Conference_Location

San Diego, CA

Print_ISBN

1-4244-1479-2

Type

conf

DOI

10.1109/INTMAG.2006.375899

Filename

4261750