Title :
p-type silicon drift detectors: first results
Author :
Wang, N.W. ; Krieger, B. ; Krofcheck, D. ; Lewak, D. ; Naudet, C.J. ; O´Donnell, Ryan ; Odyniec, G. ; Partlan, M. ; Rudolph, H.W. ; Walton, J.T. ; Wilson, W.K.
Author_Institution :
Lawrence Berkeley Lab., CA, USA
fDate :
30 Oct-5 Nov 1994
Abstract :
We have fabricated a 4 cm long, position-sensitive silicon drift detector using high purity, p-type silicon as the starting material. In this paper, we describe the double-sided planar process used to fabricate the detectors and the strategy used to suppress surface carrier inversion due to the presence of fixed positive charge at the Si-SiO2 interface. The key issue in optimizing the fabrication process has been to minimize leakage currents and maximize breakdown voltages. Preliminary tests show that a drift signal can be measured across the entire length of the detectors and that the transit time of the holes varies linearly with the position of the induced charge signal
Keywords :
leakage currents; position sensitive particle detectors; silicon radiation detectors; 4 cm; Si; Si drift detector; Si-SiO2; Si/SiO2 interface; breakdown voltage; double-sided planar process; fabrication; hole transit time; leakage currents; p-type; position-sensitive; surface carrier inversion; Charge measurement; Current measurement; Fabrication; Leakage current; Length measurement; Position measurement; Position sensitive particle detectors; Silicon; Testing; Time measurement;
Conference_Titel :
Nuclear Science Symposium and Medical Imaging Conference, 1994., 1994 IEEE Conference Record
Conference_Location :
Norfolk, VA
Print_ISBN :
0-7803-2544-3
DOI :
10.1109/NSSMIC.1994.474435