Design of Flexible Tactile Sensor Based on Three-Component Force and Its Fabrication

Author

Kim, Jong-Ho ; Lee, Jeong-Il ; Lee, Hyo-Jik ; Park, Yon-Kyu ; Kim, Min-Seok ; Kang, Dae-Im

Author_Institution

Division of Physical Metrology Mass and Force Group Korea Research Institute of Standards and Science P.O. Box 102, Yusong-Gu, Daejeon, 305-600, South Korea; jhk@kriss.re.kr

fYear

2005

fDate

18-22 April 2005

Firstpage

2578

Lastpage

2581

Abstract

This paper describes a design of a tactile sensor, which can measure three components forces. The bio-mimetic tactile sensor, alternative to human’s finger, is composed of 100 micro force sensors, and its size being 10 mm x 10 mm. Each micro force sensor has a square membrane, and its force capacity is 0.3 N in the three-axis directions. On the other hand, the measuring method of three-component force signals without interference was suggested in case of four strain gages and the number of minimum data lines. We have fabricated the tactile sensor using flexible MEMS technology based on polymer material.

Keywords

Robot; flexible MEMS; normal force; polymer; shear force; tactile sensor; Biomembranes; Fabrication; Fingers; Force measurement; Force sensors; Interference; Micromechanical devices; Polymers; Strain measurement; Tactile sensors; Robot; flexible MEMS; normal force; polymer; shear force; tactile sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Robotics and Automation, 2005. ICRA 2005. Proceedings of the 2005 IEEE International Conference on

Print_ISBN

0-7803-8914-X

Type

conf

DOI

10.1109/ROBOT.2005.1570501

Filename

1570501