Title :
Highly sensitive refractive index sensor based on structure modulation of digital versatile discs
Author :
Jung-Po Chen ; Yi-Ping Chen ; Ding-Zheng Lin
Author_Institution :
Electron. & Optoelectron. Res. Lab., Ind. Technol. Res. Inst., Hsinchu, Taiwan
Abstract :
Surface plasmon resonance (SPR) is a key sensing technique for chemical and biological sensor. Recently, researchers proposed different nanostructures for refractive index and bio-sensing [1-4]. In this work, we proposed a high sensitivity refractive index sensor based on modulations of digital versatile discs (DVD) structures. We used laser beam lithography process to fabricate regular substructures on the lands of DVD substrate. We found the modulated structure will narrow the resonance spectrum and improve sensitivity a little. However, the substructure will significantly improve the coupling efficiency of incident light to excite surface plasmon. Based on our fabrication technique, a cheap and uniform surface plasmon resonance (SPR) sensor with sensitivity of 764nm per refractive index unit (nm/RIU) and ~20 figure of merit (FoM) is demonstrated experimentally.
Keywords :
digital versatile discs; measurement by laser beam; optical modulation; refractive index measurement; surface plasmon resonance; biological sensor; biosensing; chemical sensor; digital versatile discs; highly sensitive refractive index sensor; key sensing technique; laser beam lithography; nanostructures; structure modulation; surface plasmon resonance; Gold; Laser beams; Modulation; Plasmons; Refractive index; Substrates; Surface waves;
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2012.6411077