Title :
The effects of small lot manufacturing on AMHS operation and equipment front-end design
Author :
Zimmerhackl, Olaf ; Rothe, Jan ; Schmidt, Kilian ; Marshall, Les ; Honold, Alfred
Author_Institution :
Adv. Micro Devices, Dresden
Abstract :
This paper analyzes the effects of small lot manufacturing (SLM) on equipment operation and fab performance. It also discusses equipment front-end design challenges and describes options for carrier handling and AMHS operation to maximize the productivity benefits of small lot manufacturing. This paper focuses primarily on the material handling aspects of SLM and as such, does not discuss the influences of equipment Setup or First Wafer Delay which have been covered in other related publications.
Keywords :
integrated circuit design; integrated circuit manufacture; materials handling; production engineering computing; productivity; AMHS operation; automated material handling system; equipment front-end design; fab performance; productivity maximization; small lot semiconductor manufacturing; Buffer storage; Lithography; Materials handling; Performance analysis; Productivity; Pulp manufacturing; Semiconductor device manufacture; Switches; Throughput; Time measurement;
Conference_Titel :
Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
Conference_Location :
Santa Clara, CA
Print_ISBN :
978-1-4244-1142-9
Electronic_ISBN :
1523-553X
DOI :
10.1109/ISSM.2007.4446800
