The effects of small lot manufacturing on AMHS operation and equipment front-end design

Author

Zimmerhackl, Olaf ; Rothe, Jan ; Schmidt, Kilian ; Marshall, Les ; Honold, Alfred

Author_Institution

Adv. Micro Devices, Dresden

fYear

2007

fDate

15-17 Oct. 2007

Firstpage

1

Lastpage

5

Abstract

This paper analyzes the effects of small lot manufacturing (SLM) on equipment operation and fab performance. It also discusses equipment front-end design challenges and describes options for carrier handling and AMHS operation to maximize the productivity benefits of small lot manufacturing. This paper focuses primarily on the material handling aspects of SLM and as such, does not discuss the influences of equipment Setup or First Wafer Delay which have been covered in other related publications.

Keywords

integrated circuit design; integrated circuit manufacture; materials handling; production engineering computing; productivity; AMHS operation; automated material handling system; equipment front-end design; fab performance; productivity maximization; small lot semiconductor manufacturing; Buffer storage; Lithography; Materials handling; Performance analysis; Productivity; Pulp manufacturing; Semiconductor device manufacture; Switches; Throughput; Time measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on

Conference_Location

Santa Clara, CA

ISSN

1523-553X

Print_ISBN

978-1-4244-1142-9

Electronic_ISBN

1523-553X

Type

conf

DOI

10.1109/ISSM.2007.4446800

Filename

4446800