Title :
A study of Time Variable Multiple Objectives scheduler for wafer fabrication
Author :
Yen-Fei, Lee ; Zhibin, Jiang ; Huai, Zhang ; Chen-Pin, Ko ; Darudin, Mohamad Zamri ; Deer, Yi
Author_Institution :
SilTerra Malaysia Sdn Bhd, Kulim
Abstract :
Wafer fabrication (Fab) is a typical large-scale complicated manufacturing system. With the enhancement of modern Fab´s automation, one of important techniques is to determine lot priority index to meet multiple objectives. Usually different objectives may be paid diverse emphases which are represented by weights. In today´s highly dynamic manufacturing environment, weights of each individual objective may change along with time, and corresponding scheduling may be regarded as the time-variable-multiple-objectives (TVMO) scheduling. The proposed TVMO algorithm presents a practical and useful way to find out trade-off between better optimality for computation, which is essential for real-time response to changes in Foundry fab.
Keywords :
production control; scheduling; semiconductor device manufacture; wafer level packaging; Fab automation; Foundry fab; dynamic manufacturing; large-scale complicated manufacturing system; lot priority index; time variable multiple objectives scheduling; wafer fabrication; Fabrication; Foundries; Fuzzy logic; Fuzzy sets; Job shop scheduling; Manufacturing; Notice of Violation; Processor scheduling; Production; Scheduling algorithm;
Conference_Titel :
Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
Conference_Location :
Santa Clara, CA
Print_ISBN :
978-1-4244-1142-9
Electronic_ISBN :
1523-553X
DOI :
10.1109/ISSM.2007.4446813