Title :
Effect of Ge profile on the frequency response of a SiGe pFET on sapphire technology
Author :
Mathew, S.J. ; Ansley, W.E. ; Dubbelday, W.B. ; Cressler, J.D. ; Ott, J. ; Chu, J.O. ; Meyerson, B.S. ; Kavanagh, K.L. ; Mooney, P.M. ; Lagnado, I.
Author_Institution :
Alabama Microelectron. Sci. & Technol. Center, Auburn Univ., AL, USA
Abstract :
We investigate the dc and microwave properties of a SiGe pFET on sapphire technology. The results show that both cutoff frequency (f/sub T/) and low-field mobility (/spl mu//sub eff/) of SiGe pFETs improve with the integrated Ge dose in the SiGe channel, when compared to the Si pFET. Silicon CMOS on sapphire (Al/sub 2/O/sub 3/) technology is ideally suited for microwave circuits since it has a low dielectric loss substrate, low noise figure, excellent radiation hardness, and reduced punch-through effects. Recent studies of SiGe CMOS on sapphire technology have shown improvements in pFET mobility and transconductance at 300 K and 77 K, compared to Si. This work focuses on the effects of Ge profile in the SiGe channel on the low field mobility and cutoff frequency of a SiGe pFET on sapphire technology.
Keywords :
Ge-Si alloys; MOSFET; carrier mobility; microwave transistors; sapphire; semiconductor materials; CMOS; DC properties; Ge profile; SiGe pFET on sapphire technology; SiGe-Al/sub 2/O/sub 3/; cutoff frequency; frequency response; low-field mobility; microwave properties; transconductance; CMOS technology; Cutoff frequency; Dielectric losses; Dielectric substrates; Frequency response; Germanium silicon alloys; Integrated circuit technology; Microwave circuits; Microwave technology; Silicon germanium;
Conference_Titel :
Device Research Conference Digest, 1997. 5th
Conference_Location :
Fort Collins, CO, USA
Print_ISBN :
0-7803-3911-8
DOI :
10.1109/DRC.1997.612501
