Calibration and validation of XYΘ micropositioners with vision

Accuracy is very important criterion for micro-manipulation systems, especially for microassembly. In this paper, we propose a full procedure of kinematic calibration and validation for XYΘ micropositioners, which are used as coarse positioning in our microassembly platform. Based on vision, two methods (self-calibration and classical calibration) are presented, implemented, tested and compared. The differential evolution (DE) algorithm is applied to identify the kinematic parameters. After calibrations, we perform tests of accuracy and repeatability through controlling the micropositioners via inverse kinematics.