Title :
Study of a cantilevered actuator driven by magnetostriction in low magnetic field
Author :
Yokota, C. ; Yamazaki, A. ; Sendoh, M. ; Agatsuma, S. ; Ishiyama, K. ; Arai, K.
Author_Institution :
Tohoku Univ., Sendai
Abstract :
A cantilevered actuator is fabricated in this study by sputter deposition using amorphous Fe72Si14B14 as the magnetostrictive material. The displacement of the cantilever is observed with applying the magnetic field of 10 kA/m to the width direction of the cantilever. Results show that the displacement of the cantilever increased with decreasing substrate thickness, and has a peak value at the thickness of the magnetic thin film of 0.5 mum when the substrate thickness is 7.5 mum.
Keywords :
amorphous magnetic materials; boron alloys; electromagnetic actuators; ferromagnetic materials; iron alloys; magnetic thin films; magnetostriction; silicon alloys; sputter deposition; Fe72Si14B14; amorphous magnetostrictive material; cantilevered actuator; magnetic thin film; magnetostriction; size 0.5 mum; size 7.5 mum; sputter deposition; substrate thickness; Actuators; Amorphous magnetic materials; Amorphous materials; Iron; Magnetic fields; Magnetic films; Magnetic materials; Magnetostriction; Sputtering; Substrates;
Conference_Titel :
Magnetics Conference, 2006. INTERMAG 2006. IEEE International
Conference_Location :
San Diego, CA
Print_ISBN :
1-4244-1479-2
DOI :
10.1109/INTMAG.2006.376402
