Title :
Gold recovery - high efficient, cost effective and reliable
Author :
Jantschak, Andreas ; Daniels, Marc
Author_Institution :
NXP Semicond., Hamburg
Abstract :
In the semiconductor industry gold is used in different applications. Regarding the high costs of the gold and the amounts applied in the metalization processes it is worth to recover a maximum of that precious metal. The introduction of the new recovery concept described in this abstract meant a breakthrough in gold recycling for NXP Semiconductors Hamburg. The results of this project demonstrate that it is possible to establish this kind of recovery process in the semiconductor industry.
Keywords :
gold; metallisation; recycling; semiconductor device manufacture; Au; NXP Semiconductors Hamburg; gold recovery process; gold recycling; metalization processes; semiconductor industry; Aluminum; Chemicals; Cleaning; Costs; Electronics industry; Etching; Gold; Semiconductor device reliability; Solids; Sputtering;
Conference_Titel :
Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
Conference_Location :
Santa Clara, CA
Print_ISBN :
978-1-4244-1142-9
Electronic_ISBN :
1523-553X
DOI :
10.1109/ISSM.2007.4446879
