Biosensor platform based on stress-improved piezoelectric membrane

The new design of a piezoelectric diaphragm as a sensor platform is introduced. A pressure chamber is added through the packaging process. It is theoretically indicated that the sensitivity of a piezoelectric diaphragm with an introduced pressure difference between two sides is significantly higher than that without this pressure difference. The high sensitivity is also experimentally proven. The resonance behavior of the piezoelectric diaphragm was characterized for the diaphragm under different conditions. It is found that the introduction of this pressure difference improves the quality merit of the device.