DocumentCode
2946392
Title
Intrinsic Reliability of AlOx-based Magnetic Tunnel Junctions
Author
Akerman, J. ; DeHerrera, M. ; Slaughter, J.M. ; Dave, R. ; Sun, J. ; Tehrani, S.
Author_Institution
KTH, Kista
fYear
2006
fDate
8-12 May 2006
Firstpage
729
Lastpage
729
Abstract
The intrinsic reliability of MTJs is studied via the ramped breakdown voltage (Vbd), which has the benefit of a much shorter measurement time than TDDB where a constant applied voltage is used. Ramped breakdown measurements were performed on wafers at room temperature for both bias polarities.
Keywords
aluminium compounds; magnetic tunnelling; magnetoresistive devices; oxidation; reliability; AlO; bias polarities; intrinsic reliability; magnetic tunnel junctions; magnetoresistive random access memory; oxidation; ramped breakdown voltage; temperature 293 K to 298 K; Electric breakdown; Electric resistance; Electrical resistance measurement; Electrodes; Magnetic materials; Magnetic tunneling; Magnetoresistance; Materials reliability; Oxidation; Plasma measurements;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 2006. INTERMAG 2006. IEEE International
Conference_Location
San Diego, CA
Print_ISBN
1-4244-1479-2
Type
conf
DOI
10.1109/INTMAG.2006.376453
Filename
4262162
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