Title :
Physico-chemical characterization of Ta2O5 thin films/electrolyte junctions
Author_Institution :
Univ. di Palermo, Palermo
Abstract :
An analysis of the electronic properties of Ta2O5/electrolyte junction is reported for thin film( les 14 nm) grown on tantalum in acidic electrolyte. The investigation is carried out by the synergetic use of three techniques: Photocurrent Spectroscopy (PCS), Electrochemical Impedance Spectroscopy (EIS) and Differential Admittance (DA) measurements. PCS is a non destructive optical technique based on the analysis of the electrochemical response (photocurrent or photopotential) of the electrode/electrolyte interface under irradiation with photons of suitable energy. PCS can provide information on the energetic of metal/oxide/electrolyte interfaces (flat band potential determination, conduction and valence band edges location). EIS allows to model the electrochemical behaviour of the oxide/electrolyte interface and AD measurements allow to get information on the tantalum grown in the investigated conditions.
Keywords :
conduction bands; dielectric thin films; electric admittance; electrochemical impedance spectroscopy; electrolytes; interface phenomena; photoconductivity; tantalum compounds; valence bands; Ta2O5; acidic electrolyte; conduction band edges; differential admittance measurements; electrochemical impedance spectroscopy; electrode-electrolyte interface; metal-oxide-electrolyte interfaces; nondestructive optical technique; oxide-electrolyte interface; photocurrent spectroscopy; photopotential; tantalum; thin film-electrolyte junction; valence band edges; Admittance; Capacitors; Electrochemical impedance spectroscopy; Electrodes; High-K gate dielectrics; Impedance measurement; Personal communication networks; Photoconductivity; Semiconductor devices; Transistors;
Conference_Titel :
ICTON Mediterranean Winter Conference, 2007. ICTON-MW 2007
Conference_Location :
Sousse
Print_ISBN :
978-1-4244-1639-4
Electronic_ISBN :
978-1-4244-1639-4
DOI :
10.1109/ICTONMW.2007.4446965
