DocumentCode
2947213
Title
Lattice modulation of auto-cloned photonic crystals
Author
Kawakami, Shojiro ; Ohtera, Yasuo ; Kawashima, T. ; Sato, Takao
Author_Institution
New Ind. Creation Hatchery Center, Tohoku Univ., Sendai, Japan
fYear
2000
fDate
10-15 Sept. 2000
Abstract
Summary form only given. We have thus far developed a new fabrication process of photonic crystals of an arbitrary dimensions (autocloning). It is based on the automatic evolution of the periodic structure resulting from pattern dynamics of sputter deposition and sputter etching. It has a number of advantages summarized in the following: applicable to 1D, 2D, 3D; excellent reproducibility; and is usable in a wide variety of material systems.
Keywords
optical fabrication; photonic band gap; sputter deposition; arbitrary dimensions; auto-cloned photonic crystals; autocloning; automatic evolution; fabrication process; lattice modulation; material systems; pattern dynamics; periodic structure; reproducibility; sputter deposition; sputter etching; Lattices; Optical modulation; Photonic crystals;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 2000. Conference Digest. 2000 Conference on
Conference_Location
Nice
Print_ISBN
0-7803-6319-1
Type
conf
DOI
10.1109/CLEOE.2000.909784
Filename
909784
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