Resonant micro-cantilever chemical sensor with one-step synthesis of -COOH functionalized mesoporous-silica nanoparticles for detection of trace-level organophosphorus pesticide

Carboxylic acid-functionalized mesoporous silica nanoparticles (CF-MSNs) with ultra-high specific surface area are synthesized successfully as sensing material. With the CF-MSNs sensing material loaded onto our lab-made resonant micro-cantilever, which is with both resonance-exciting and self-sensing elements integrated, a new micro-gravimetric organophosphate (OP) sensor is developed. The sensor shows satisfactory detection limit of hundreds of ppb (parts-per-billion) to acephate vapor in air.