Improved distributed mems matching network for low frequency applications using a slow-wave structure

A reconfigurable impedance matching network has been developed for low frequency applications. The network is based on a distributed MEMS transmission line (DMTL) coupled with a slow-wave structure to reduce the physical length of the network by 25 % in comparison with a traditional DMTL. The proposed slow-wave structure (SW-DMTL) is studied in order to validate the integration possibilities and the improvements obtained. The SW-DMTL parameters are extracted from the electromagnetic simulation results and are used to design the SW-DMTL impedance tuner. The measured impedance coverage is presented and validates the potential of the proposed structure to realize a miniature DMTL matching network with a wide impedance coverage.