Title :
Verification of wafer-level calibration accuracy at high temperatures
Author :
Rumiantsev, Andrej ; Doerner, Ralf
Author_Institution :
SUSS MicroTec Test Systems GmbH, Suss-Str. 1, Sacka, D-01561, Germany
Abstract :
This article presents the results of accuracy verification of wafer-level calibration at high temperatures based on coplanar calibration standards. The electrical characteristics of different commercially available coplanar calibration lines were extracted and compared at different temperatures. Finally, the accuracy of lumped calibrations at variable temperatures was verified by definition of the worst-case error bounds for the measurement of passive devices and compared to the reference NIST multiline TRL.
Keywords :
calibration; error correction; measurement standards; millimetre wave measurement; coplanar calibration lines; coplanar calibration standards; error bounds; high temperature; lumped calibrations; wafer-level calibration accuracy; Attenuation; Benchmark testing; Calibration; Electric variables; Impedance; Measurement standards; NIST; Probes; Scattering parameters; Temperature; calibration; calibration comparison; error correction; scattering parameters measurement;
Conference_Titel :
Microwave Symposium Digest, 2008 IEEE MTT-S International
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1780-3
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2008.4633313
