Minimize distortion in free-standing sensor plates using electroformed reinforced beam

This paper describes a novel fabrication method to minimize bending and distortion of sensor plates by adding a thick (a few microns) nickel-reinforced beam on a thin (≤one micron) sensor plate. The creation of a thick nickel layer on a thin oxide film by electroforming at relatively low temperature (~45°C) reduces the amount of bending and improves the flatness. We take advantage of a simple Ni electroforming formula [1] for reproducing nickel parts and structures with minimum distortion that creates a flat nickel-reinforced beam.