DocumentCode
2950300
Title
Intelligent 3-D micro-structuring with UV-laser systems
Author
von Alvensleban, F. ; Korber, K. ; Kulik, C.
Author_Institution
Laser Zentrum Hannover eV, Germany
fYear
2000
fDate
10-15 Sept. 2000
Abstract
Summary form only given. Flexible manufacturing techniques are necessary for the three-dimensional micro-structuring of prototypes, small batch sizes and tools for, e.g. microembossing and molding. This paper shows the enormous potential of UV-lasers for the flexible and economical production of microcomponents for a huge variety of materials. In addition, specially-developed machine technology is presented.
Keywords
CAD/CAM; computerised numerical control; flexible manufacturing systems; laser ablation; laser beam machining; micromachining; moulding; CAD/CAM software; CNC controlled machine technology; UV-laser systems; ablation model; economical production; flexible manufacturing techniques; intelligent 3D microstructuring; microembossing; micromachining; molding; precision handling; Frequency modulation; Laser ablation; Laser beams; Laser modes; Laser stability; Optical pulse generation; Optical sensors; Optical transmitters; Pulse modulation; Surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 2000. Conference Digest. 2000 Conference on
Conference_Location
Nice
Print_ISBN
0-7803-6319-1
Type
conf
DOI
10.1109/CLEOE.2000.909973
Filename
909973
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