• DocumentCode
    2950315
  • Title

    Low-power magnetically-actuated microvalves for highly parallel microfluidic automation

  • Author

    Chang, P.J. ; Yung-Yuan Kao ; Mei-Lin Chan ; Megens, M. ; Horsley, David A.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of California, Davis, Davis, CA, USA
  • fYear
    2012
  • fDate
    28-31 Oct. 2012
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    This paper presents the design and actuation of low-power, magnetically-actuated microvalves fabricated with CMOS-compatible technology. A prototype chip comprised of 64 microvalves within 2.2 × 2.2 mm2 and requiring <; 50 mW to actuate is demonstrated. Each valve consists of a microcoil and a paramagnetic bead as the valve seat, and is used to address a 50 picoliter well to enable highly parallel biochemical sensing and analysis operations.
  • Keywords
    CMOS integrated circuits; biochemistry; low-power electronics; microfluidics; microvalves; CMOS-compatible technology; analysis operations; highly parallel biochemical sensing; highly parallel microfluidic automation; low-power magnetically-actuated microvalves; Current measurement; Force; Glass; Magnetic field measurement; Microvalves; Threshold current;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2012 IEEE
  • Conference_Location
    Taipei
  • ISSN
    1930-0395
  • Print_ISBN
    978-1-4577-1766-6
  • Electronic_ISBN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2012.6411397
  • Filename
    6411397