• DocumentCode
    2950359
  • Title

    Message from ISSM 2010 executive committee chair

  • Author

    Inoue, Michihiro

  • Author_Institution
    Innovation Coordinator, National Institute of Advanced Industrial Science and Technology(AIST), Japan
  • fYear
    2010
  • fDate
    18-20 Oct. 2010
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    On behalf of the International Symposium on Semiconductor Manufacturing (ISSM) 2010 Executive Committee, it is a great pleasure and honor for us to have you at the eighteenth annual ISSM.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing (ISSM), 2010 International Symposium on
  • Conference_Location
    Tokyo
  • ISSN
    1523-553X
  • Print_ISBN
    978-1-4577-0392-8
  • Type

    conf

  • Filename
    5750176
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2950359