مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

2950455

Title :

ISSM 2010 program at a glance

fYear :

2010

fDate :

18-20 Oct. 2010

Firstpage :

Lastpage :

Abstract :

Provides a schedule of conference events and a listing of which papers were presented in each session.

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Semiconductor Manufacturing (ISSM), 2010 International Symposium on

Conference_Location :

Tokyo

ISSN :

1523-553X

Print_ISBN :

978-1-4577-0392-8

Type :

conf

Filename :

5750181

Link To Document :