Title :
Flux screening technique for growth of high quality ferrite films by pulsed laser deposition
Author :
Chen, Y. ; Lu, T. ; Zhang, X. ; Vittoria, C. ; Harris, V.G.
Author_Institution :
Northeastern Univ., Boston
Abstract :
High quality ferrite films were grown by pulsed laser deposition (PLD). In this approach a stainless steel screen is placed between the MnZn-ferrite target and the substrate in a PLD system. MnZn ferrite films were deposited on (400) Si substrate by ablating a Mn0.48Zn0.46Fe2.06O4 target using a KrF excimer laser operated at 5 Hz and 1.5~2 J/cm2. We measured the structural, magnetic and microwave properties of the films. FMR linewidth and surface morphology of the ferrite films produced by normal PLD and flux screened PLD process are measured.
Keywords :
excimer lasers; ferrites; magnetic thin films; manganese compounds; microwave materials; pulsed laser deposition; surface morphology; zinc compounds; FMR linewidth measurement; KrF excimer laser; MnZnFe2O3-FeCrCJk-Si; Si; ferrite film growth; flux screening technique; frequency 5 Hz; magnetic properties; microwave properties; pulsed laser deposition; structural properties; surface morphology; Ferrite films; Iron; Magnetic flux; Magnetic properties; Masers; Microwave measurements; Optical pulses; Pulsed laser deposition; Steel; Zinc;
Conference_Titel :
Magnetics Conference, 2006. INTERMAG 2006. IEEE International
Conference_Location :
San Diego, CA
Print_ISBN :
1-4244-1479-2
DOI :
10.1109/INTMAG.2006.375468
