DocumentCode :
2951247
Title :
Behavior of aluminum nitride ceramic surfaces under hydrothermal oxidation treatments
Author :
Suryanarayana, D. ; Matienzo, L.J. ; Spencer, D.F.
Author_Institution :
IBM Corp., Endicott, NY, USA
fYear :
1989
fDate :
22-24 May 1989
Firstpage :
29
Lastpage :
32
Abstract :
AlN ceramics were prepared by pressureless sintering of the nitride powders with mixtures containing yttria, magnesia and silicon nitride at 1900°C. To investigate the sensitivity of these ceramics to hydrothermal treatments, samples were treated in oxygen-containing atmospheres for different exposure times and temperatures. During the exposure, a thin layer of oxide develops and coats the ceramic surface. A variety of physical and chemical methods of analysis were used to characterize the resulting materials. Surface roughness, morphology, and weight changes during exposure were followed. The ceramic phases as formed during the sintering step and additional treatments have been characterized using X-ray photoelectron spectroscopy (XPS), and the photoelectron binding energies for the pure and reacted phases are reported. The XPS technique was also used to follow the surface evolution of the solid/gas interface produced by the surface treatments
Keywords :
X-ray photoelectron spectra; aluminium compounds; ceramics; materials testing; oxidation; sintering; substrates; 1900 degC; AlN ceramic surfaces; X-ray photoelectron spectroscopy; XPS; Y2O3-MgO-SiN mixtures; ceramic phases; chemical methods; exposure temperatures; exposure times; hydrothermal oxidation treatments; morphology; oxygen-containing atmospheres; photoelectron binding energies; physical methods; pressureless sintering; pure phases; reacted phases; solid/gas interface; surface evolution; surface roughness; surface treatments; thin oxide/layer; weight changes; Aluminum nitride; Ceramics; Chemical analysis; Magnesium compounds; Powders; Rough surfaces; Silicon; Surface morphology; Surface roughness; Surface treatment;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Components Conference, 1989. Proceedings., 39th
Conference_Location :
Houston, TX
Type :
conf
DOI :
10.1109/ECC.1989.77724
Filename :
77724
Link To Document :
بازگشت