• DocumentCode
    2951849
  • Title

    MEMS Solutions in RF applications

  • Author

    Joshi, Vinayak ; Parkhurst, R. ; Morrell, Larry ; Tornatta, Paul

  • Author_Institution
    Cavendish Kinetics, San Jose, CA, USA
  • fYear
    2013
  • fDate
    7-10 Oct. 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    MEMS devices are ideal tuning element since in a non-50 Ohm system, equivalent series resistance (ESR) is the primary source of losses in a tuning system. MEMS have less than 20% of the ESR of solid state devices and are on par with the best fixed-value passive components. Figure 2 shows the usable Q of Cavendish RF MEMS device for the frequency range and associated capacitance state.
  • Keywords
    Q-factor; micromechanical devices; passive networks; Cavendish RF MEMS device; ESR; Q usability; capacitance state; equivalent series resistance; fixed-value passive components; frequency range; solid state devices; tuning system; Antennas; Capacitance; Capacitors; Micromechanical devices; Performance evaluation; Radio frequency; Tuning;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S), 2013 IEEE
  • Conference_Location
    Monterey, CA
  • Type

    conf

  • DOI
    10.1109/S3S.2013.6716536
  • Filename
    6716536
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2951849