DocumentCode
2951940
Title
Platinum surface additive based nanostructured CuO films for ethanol sensing
Author
Parmar, Manoj ; Rajanna, K.
Author_Institution
Dept. of Instrum. & Appl. Phys., Indian Inst. of Sci., Bangalore, India
fYear
2012
fDate
28-31 Oct. 2012
Firstpage
1
Lastpage
4
Abstract
In the present work, Platinum (Pt)/Copper (II) oxide (CuO) thin film based ethanol sensors were fabricated by sputtering of Pt in varying concentrations over pre-sputtered nanostructured CuO films. The responses of these sensors as a function of Pt concentrations were studied using operating temperature modulation (200-450 °C) and ethanol concentration modulation (100-2500 ppm). During these modulations, it was found that the sensing response was maximum at operating temperature near 400 °C for all the samples irrespective of the Pt concentration dispersed over them. Moreover, the sensing behavior improves for lower Pt concentration (Pt/CuO-60s) and deteriorates for higher Pt concentration (Pt/CuO-120s). In comparison with bare CuO sample, the sensitivity of Pt/CuO-60s increased up to 22% in the linear range and 33% for maximum ethanol concentration. Hence, the well dispersed optimum Pt additive concentration improves the overall sensing behavior including sensitivity, linear working range and response as well as recovery time.
Keywords
copper compounds; gas sensors; nanosensors; platinum; sputtered coatings; Pt-CuO; ethanol concentration modulation; ethanol sensing; nanostructured films; sputter deposition; surface additive; temperature 200 C to 450 C; temperature modulation; Additives; Ethanol; Films; Modulation; Resistance; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2012 IEEE
Conference_Location
Taipei
ISSN
1930-0395
Print_ISBN
978-1-4577-1766-6
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2012.6411488
Filename
6411488
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