Title :
Laser micron particle removal from silicon surfaces: a bidimensional approach
Author :
Neves, P. ; Arronte, M. ; Vilar, R.
Author_Institution :
Dept. de Engenharia de Mater., Inst. Superior Tecnico, Lisbon, Portugal
Abstract :
Summary form only given. In this work, experimental measurements of cleaning efficiency for three different metallic particulate contaminants (Au, 1.2 /spl mu/m; Cu 3 /spl mu/m and W 0.7 /spl mu/m) on silicon are reported. To study the dependence of cleaning efficiency on the type of contaminant, absorption of laser radiation by particles and substrate is considered. The shadow effect of the metallic particles on the substrate imposes a bidimensional analysis of the temperature profile in the substrate.
Keywords :
laser materials processing; light absorption; silicon; substrates; surface cleaning; 0.7 mum; 1.2 mum; 3 mum; Au; Cu; Si; W; bidimensional analysis; bidimensional approach; cleaning efficiency; contaminant; laser micron particle removal; laser radiation absorption; metallic particles; metallic particulate contaminants; shadow effect; silicon surfaces; temperature profile; Argon; Cleaning; Gas lasers; Gases; Laser beams; Oxidation; Semiconductor films; Silicon; Substrates; Surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics Europe, 2000. Conference Digest. 2000 Conference on
Conference_Location :
Nice
Print_ISBN :
0-7803-6319-1
DOI :
10.1109/CLEOE.2000.910071
