Title :
Pulsed laser deposition organic and inorganic dopant systems for chemical sensors
Author :
Vyslouzil, F. ; Vrnata, M. ; Myslik, V. ; Jelinek, M. ; Lancok, J.
Author_Institution :
Inst. of Chem. Technol., Czechoslovak Acad. of Sci., Prague, Czech Republic
Abstract :
Summary form only. Chemical sensors utilising the change of the surface conductivity are based on the ability of thin semiconductive layers to absorb and, at higher temperatures, ionise oxygen on their surfaces. The surface of metal oxides (SnO/sub 2/) and some organic substances (SnAcAc) exhibits the ability to enter into reversible chemical reaction with gases and vapours. A KrF laser was used for sensor film deposition.
Keywords :
chemical reactions; chemical sensors; optical films; pulsed laser deposition; semiconductor thin films; surface conductivity; KrF; KrF laser; SnO/sub 2/; chemical sensors; inorganic dopant systems; ionise oxygen; metal oxides; organic dopant systems; organic substances; pulsed laser deposition; reversible chemical reaction; semiconductive layers; sensor film deposition; surface conductivity; Chemical lasers; Chemical sensors; Conductivity; Gas lasers; Gases; Optical pulses; Organic chemicals; Pulsed laser deposition; Semiconductor lasers; Temperature sensors;
Conference_Titel :
Lasers and Electro-Optics Europe, 2000. Conference Digest. 2000 Conference on
Conference_Location :
Nice
Print_ISBN :
0-7803-6319-1
DOI :
10.1109/CLEOE.2000.910076
