ITO film preparation by infrared free electron laser assistance

Summary form only. Transparent conductive thin film (indium tin oxide, ITO) is mainly used for information display elements such as liquid crystal display and touch panels. We propose a film forming method which gives the energy only to deposited film by using an infrared laser, while the substrate is maintained at low temperature. The laser wavelength is in proportion to excitation energy corresponding to a stretching vibrational mode of the irradiated molecular bond. An ordinary IR free electron laser (IR-FEL) is used as this laser The IR-FEL has a continuously tunable wavelength.