Investigation of an advanced micro-inductive sensor

Author

Kochert, P. ; Flugge, J. ; Miletic, D. ; Gatzen, H.H.

Author_Institution

Phys.-Tech. Bundesanstalt (PTB), Braunschweig, Germany

fYear

2012

fDate

28-31 Oct. 2012

Firstpage

1

Lastpage

4

Abstract

This paper presents the characterization of a miniaturized displacement sensor based on the Inductosyn^® principle. In comparison to commercially available large-scaled inductive sensors the proposed linear transducer is fabricated in thin-film technology enabling a signal period of 44 μm. In order to analyze the sensor characteristics a test setup was prototyped and a phase measurement system based on field programmable gate array (FPGA) units was developed. The measurement results prove that displacements down to 1.7 nm can be resolved and a position repeatability of about 100 nm is achievable using the proposed inductive micro sensing system.

Keywords

displacement measurement; field programmable gate arrays; inductive sensors; microfabrication; microsensors; phase measurement; thin film sensors; transducers; FPGA; Inductosyn principle; advanced microinductive sensor system; distance 1.7 nm; field programmable gate array; linear transducer; miniaturized displacement sensor; phase measurement system; thin-film technology; wavelength 44 mum; Displacement measurement; Field programmable gate arrays; Frequency measurement; Laser stability; Measurement by laser beam; Phase measurement; Windings; FPGA; inductive displacement sensor; phase meter;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2012 IEEE

Conference_Location

Taipei

ISSN

1930-0395

Print_ISBN

978-1-4577-1766-6

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2012.6411538

Filename

6411538