Title :
Interference device for roughness measurement
Author :
Maksimyak, P.P. ; Angelsky, O.V.
Author_Institution :
Correlation Opt. Dept., Chernivtsy Univ., Ukraine
Abstract :
Summary form only given. We propose an interference method based on a shearing polarisation interferometer for measuring surface roughness. It is based on the RPS approach, which preassumes: (i) infinitely extended object (all spatial frequency components of the radiation scattered by the object are present in registration zone); (ii) phase variance of the object is small; (iii) the correlation length of the inhomogeneity is larger than the wavelength.
Keywords :
light interferometry; light scattering; optical correlation; surface topography measurement; RPS approach; correlation length; infinitely extended object; inhomogeneity; interference device; interference method; phase variance; registration zone; roughness measurement; shearing polarisation interferometer; spatial frequency components; surface roughness; Automated highways; Fluorescence; Interference; Monitoring; Optical interferometry; Optical scattering; Optical surface waves; Rough surfaces; Surface roughness; Water pollution;
Conference_Titel :
Lasers and Electro-Optics Europe, 2000. Conference Digest. 2000 Conference on
Conference_Location :
Nice
Print_ISBN :
0-7803-6319-1
DOI :
10.1109/CLEOE.2000.910141
