DocumentCode
2953213
Title
Interference device for roughness measurement
Author
Maksimyak, P.P. ; Angelsky, O.V.
Author_Institution
Correlation Opt. Dept., Chernivtsy Univ., Ukraine
fYear
2000
fDate
10-15 Sept. 2000
Abstract
Summary form only given. We propose an interference method based on a shearing polarisation interferometer for measuring surface roughness. It is based on the RPS approach, which preassumes: (i) infinitely extended object (all spatial frequency components of the radiation scattered by the object are present in registration zone); (ii) phase variance of the object is small; (iii) the correlation length of the inhomogeneity is larger than the wavelength.
Keywords
light interferometry; light scattering; optical correlation; surface topography measurement; RPS approach; correlation length; infinitely extended object; inhomogeneity; interference device; interference method; phase variance; registration zone; roughness measurement; shearing polarisation interferometer; spatial frequency components; surface roughness; Automated highways; Fluorescence; Interference; Monitoring; Optical interferometry; Optical scattering; Optical surface waves; Rough surfaces; Surface roughness; Water pollution;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 2000. Conference Digest. 2000 Conference on
Conference_Location
Nice
Print_ISBN
0-7803-6319-1
Type
conf
DOI
10.1109/CLEOE.2000.910141
Filename
910141
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