DocumentCode
2953272
Title
Interferometry for rough surface
Author
Sakuma, H.
Author_Institution
Fac. of Eng., Tokyo Metropolitan Univ., Japan
fYear
2000
fDate
10-15 Sept. 2000
Abstract
Summary form only. Interferometry is suitable for the inspection of smooth surfaces. However, the fringe pattern is not observable for a rough surface, such as a machined surface, because of the light scattering. A technique which enables one to observe the interference fringes for a rough surface is proposed in this paper.
Keywords
inspection; light interferometry; light scattering; stainless steel; surface topography measurement; fringe pattern; interference fringes; light interferometry; light scattering; machined surface; rough surface measurement; Frequency; Interferometry; Rough surfaces; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 2000. Conference Digest. 2000 Conference on
Conference_Location
Nice
Print_ISBN
0-7803-6319-1
Type
conf
DOI
10.1109/CLEOE.2000.910143
Filename
910143
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