Title :
Interferometry for rough surface
Author_Institution :
Fac. of Eng., Tokyo Metropolitan Univ., Japan
Abstract :
Summary form only. Interferometry is suitable for the inspection of smooth surfaces. However, the fringe pattern is not observable for a rough surface, such as a machined surface, because of the light scattering. A technique which enables one to observe the interference fringes for a rough surface is proposed in this paper.
Keywords :
inspection; light interferometry; light scattering; stainless steel; surface topography measurement; fringe pattern; interference fringes; light interferometry; light scattering; machined surface; rough surface measurement; Frequency; Interferometry; Rough surfaces; Surface roughness;
Conference_Titel :
Lasers and Electro-Optics Europe, 2000. Conference Digest. 2000 Conference on
Conference_Location :
Nice
Print_ISBN :
0-7803-6319-1
DOI :
10.1109/CLEOE.2000.910143
