Title :
Heater power and thermal gyroscope sensitivity
Author :
Zarei, Niloofar ; Leung, Alice ; Jones, John
Abstract :
A micromachined gyroscope has been designed that measures rotation through the deflection of an oscillating stream of heated gas and its detection by symmetrically placed thermal sensors. Simulations of the physics of this device and experimental setup are used to investigate the impact of heater power on gyroscope sensitivity.
Keywords :
gyroscopes; micromachining; microsensors; rotation measurement; temperature measurement; temperature sensors; heated gas; heater power; micromachined gyroscope; oscillating stream deflection; rotation measurement; symmetrically placed thermal sensors; thermal gyroscope sensitivity; Force; Gyroscopes; Heating; Mathematical model; Micromechanical devices; Sensitivity; Temperature sensors;
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2012.6411580
