Title :
A miniaturized VCSEL-based system for optical sensing in a microfluidic channel
Author :
Reig, Benjamin ; Bardinal, Veronique ; Camps, Thierry ; Doucet, Jean-Baptiste ; Daran, Emmanuelle
Author_Institution :
LAAS, Univ. de Toulouse, Toulouse, France
Abstract :
We report on design and fabrication of a VCSEL-based Micro-Optical-Electrical-Mechanical-System (MOEMS) suited for portable optical biosensors. It is based on a tunable polymer microlens directly integrated on the surface of the VCSEL laser device. We demonstrate that this method leads to a VCSEL focusing at a working distance of ~300μm suitable for optical analysis in a microfluidic channel. Moreover, as the microlens can be vertically moved up to 8μm with an applied power of only 43 mW (3V), a dynamic scan of the laser spot is possible over 100μm. This integrated approach opens new insights for the use of VCSEL arrays in miniaturized optical sensors.
Keywords :
microfabrication; microfluidics; microlenses; microsensors; optical sensors; surface emitting lasers; VCSEL arrays; VCSEL laser device; VCSEL-based MOEMS fabrication; VCSEL-based microoptical-electrical-mechanical-system fabrication; distance 300 mum; microfluidic channel; miniaturized VCSEL-based system; miniaturized optical sensors; optical analysis; portable optical biosensors; power 43 mW; tunable polymer microlens; vertical-cavity surface-emitting laser; voltage 3 V; Laser beams; Lenses; Microoptics; Optical device fabrication; Optical sensors; Vertical cavity surface emitting lasers;
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2012.6411593
