Microelectronic transducers for heat-power engineering

The problems of measurement of flow rate fluids (gas or liquid) or heat leakage has a great importance for heat power engineering and civil engineering. A variety of methods and transducers has been developed for the solution of these problems. For the measurement of the flow rate the ultrasound, heat, electromagnetic and mechanical methods and transducers are using. For the control of heat losses the thermal electronic transducers are using as well. At present the especial attention attracts the transducers fabricated on the base of microsystem technology due to high sensitivity, small sizes and cheapness. However, using of such transducers is usually limited by the upper boundary of the range of work temperatures of the silicon devices (120...130degC). In this report the microsystem technology is used for the building of the gas and liquid flow rate meters and heat flux meters working up to the temperature of 250degC.