Title :
Silicon-on-insulator based optical waveguide and integrated switch matrix
Author :
Shaowu, Chen ; Jinzhong, Yu ; Jingwei, Liu ; Zhangtao, Wang ; Jinsong, Xia
Author_Institution :
Inst. of Semicond., Chinese Acad. of Sci., Beijing, China
fDate :
29 Sept.-1 Oct. 2004
Abstract :
This research focuses on the design and fabrication of large cross-section single-mode rib waveguide, multimode interference couplers, 2×2 switch element and 4×4 switch matrix using SOI technology. The switch shows a much quicker response speed of 5-8 μs and the power consumption is 140 mW due to the very thin top cladding SiO2 film and the heat isolating trenches between the phase-shifting waveguide arms.
Keywords :
integrated optics; optical couplers; optical design techniques; optical fabrication; optical phase shifters; optical switches; optical waveguides; rib waveguides; silicon compounds; silicon-on-insulator; thermo-optical devices; thin films; 140 mW; 5 to 8 mum; Si; SiO2; SiO2 film; heat isolating trenches; integrated switch matrix; multimode interference couplers; optical design; optical fabrication; optical waveguide; phase-shifting waveguide arms; rib waveguide; silicon-on-insulator; single-mode waveguide; switch element; thermooptic switches; thin top cladding; Couplers; Integrated optics; Interference; Isolation technology; Optical device fabrication; Optical films; Optical switches; Optical waveguides; Silicon on insulator technology; Transmission line matrix methods;
Conference_Titel :
Group IV Photonics, 2004. First IEEE International Conference on
Print_ISBN :
0-7803-8474-1
DOI :
10.1109/GROUP4.2004.1416648
