A CMOS-based chemical stimulator with microfluid ejection function toward an artificial synaptic device

A CMOS-based multisite microfluid ejection device was fabricated and demonstrated. Our aim is to fabricate the device as a chemical stimulator for neuron cells at multiple sites by the local release of chemical compounds to mimic synaptic functions artificially. An array of micro-pumps was fabricated on the CMOS chip. Microfluid ejection was performed by actuation of a deformable silicone membrane. We measured the membrane displacement to characterize the performance of the micropump. Using this device, we successfully demonstrated microfluid ejection. The newly designed chip for implantation in a mouse brain is also shown.