Title :
Propagation characteristics of Si nitride optical waveguide integrated with Si p-i-n diodes for light emitter and detector
Author :
Yamada, A. ; Sakuraba, M. ; Murota, J. ; Wada, Kazuyoshi ; Kimerling, L.C.
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
fDate :
29 Sept.-1 Oct. 2004
Abstract :
For light propagation in Si nitride optical waveguides with various width, bending loss is evaluated, and the bending radius dependence is clarified using a pair of Si p-i-n diodes integrated on Si substrate.
Keywords :
elemental semiconductors; integrated optoelectronics; light emitting diodes; optical waveguides; p-i-n diodes; photodetectors; silicon; silicon compounds; waveguide discontinuities; Si; Si nitride optical waveguide; Si p-i-n diodes; SiN; bending loss; detector; light emitter; Integrated optics; Light emitting diodes; Optical propagation; Optical refraction; Optical scattering; Optical variables control; Optical waveguides; P-i-n diodes; Propagation losses; Stimulated emission;
Conference_Titel :
Group IV Photonics, 2004. First IEEE International Conference on
Print_ISBN :
0-7803-8474-1
DOI :
10.1109/GROUP4.2004.1416706