Title :
ICMTS 1998. Proceedings of 1998 International Conference on Microelectronic Test Structures (Cat. No.98CH36157)
Abstract :
The following topics were dealt with: matching; CD metrology; parameter extraction; yield and reliability; interconnects and capacitance measurements
Keywords :
automatic testing; capacitance measurement; integrated circuit interconnections; integrated circuit measurement; integrated circuit modelling; integrated circuit reliability; integrated circuit testing; lithography; semiconductor device models; semiconductor device reliability; semiconductor device testing; CD metrology; capacitance measurements; interconnects; matching; microelectronic test structures; parameter extraction; reliability; yield;
Conference_Titel :
Microelectronic Test Structures, 1998. ICMTS 1998., Proceedings of the 1998 International Conference on
Conference_Location :
Kanazawa, Japan
Print_ISBN :
0-7803-4348-4
DOI :
10.1109/ICMTS.1998.688017
