Title :
One and two-dimensional MMI device with strong confinement structure on SOI
Author :
Yanzhe Tang ; Yiling Sun ; Wenhui Wang ; Yaming Wu ; Jianyi Yang ; Xiaoqing Jiang
Author_Institution :
Dept. of Inf. Sci. & Electron. Eng., Zhejiang Univ., Hangzhou, China
fDate :
29 Sept.-1 Oct. 2004
Abstract :
One and two-dimensional MMI couplers with strong confinement on SOI were fabricated. Analysis shows that it has lower imbalance, wider bandwidth and better fabrication tolerance. A special process was proposed to eliminate the alignment error.
Keywords :
optical couplers; optical fabrication; silicon-on-insulator; SOI; one-dimensional MMI device; two-dimensional MMI device; Bandwidth; Couplers; Etching; Interference; Lithography; Optical device fabrication; Refractive index; Silicon compounds; Silicon on insulator technology; Sun;
Conference_Titel :
Group IV Photonics, 2004. First IEEE International Conference on
Print_ISBN :
0-7803-8474-1
DOI :
10.1109/GROUP4.2004.1416712
