Title :
Fabrication of integrated waveguide turning mirror on silicon-on-insulator
Author :
Wang, Wenhui ; Tang, Yanzhe ; Yang, Yirong ; Tie Li ; Wu, Yaming ; Yang, Jianyi ; Wang, Yuelin
Author_Institution :
Shanghai Inst. of Microsyst. & Inf. Technol., Chinese Acad. of Sci., Shanghai, China
fDate :
29 Sept.-1 Oct. 2004
Abstract :
In this paper, based on the inductively coupled plasma (ICP) etching and KOH wet etching techniques, the fabrication of integrated waveguide turning mirror (IWTMs) is presented.
Keywords :
integrated optics; mirrors; optical fabrication; optical waveguide components; silicon-on-insulator; sputter etching; KOH wet etching; inductively coupled plasma; integrated waveguide turning mirror; silicon-on-insulator; Dry etching; Integrated optics; Mirrors; Optical device fabrication; Optical devices; Optical waveguide theory; Optical waveguides; Silicon on insulator technology; Turning; Wet etching;
Conference_Titel :
Group IV Photonics, 2004. First IEEE International Conference on
Print_ISBN :
0-7803-8474-1
DOI :
10.1109/GROUP4.2004.1416715
