• DocumentCode
    295685
  • Title

    Micromachined structures for optoelectronics packaging

  • Author

    Han, Hongtao ; Boudreau, Robert A. ; Bowen, Terry ; Tan, Songsheng ; Reed, Michael L.

  • Author_Institution
    AMP Inc., Harrisburg, PA, USA
  • Volume
    1
  • fYear
    1995
  • fDate
    30-31 Oct 1995
  • Firstpage
    232
  • Abstract
    Summary form only given. We present our research results on high aspect ratio anodic aluminum oxide microstructures which is a promising technology for providing a low cost passive alignment between optical waveguides and optoelectronic devices. A schematic is given of a optical splitter assembled with anodic aluminum oxide microstructures
  • Keywords
    aluminium compounds; anodised layers; integrated optics; micromachining; optical fibre couplers; packaging; Al2O3; MEMS; anodic oxide microstructures; high aspect ratio; low cost passive alignment; micromachined structures; optical splitter; optical waveguides; optoelectronics packaging; patterned structures; Aluminum oxide; Assembly; Costs; Microstructure; Optical devices; Optical fibers; Optical transmitters; Optical waveguides; Packaging; Silicon compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society Annual Meeting, 1995. 8th Annual Meeting Conference Proceedings, Volume 1., IEEE
  • Conference_Location
    San Francisco, CA
  • Print_ISBN
    0-7803-2450-1
  • Type

    conf

  • DOI
    10.1109/LEOS.1995.484847
  • Filename
    484847
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=295685