Title :
Micromachined structures for optoelectronics packaging
Author :
Han, Hongtao ; Boudreau, Robert A. ; Bowen, Terry ; Tan, Songsheng ; Reed, Michael L.
Author_Institution :
AMP Inc., Harrisburg, PA, USA
Abstract :
Summary form only given. We present our research results on high aspect ratio anodic aluminum oxide microstructures which is a promising technology for providing a low cost passive alignment between optical waveguides and optoelectronic devices. A schematic is given of a optical splitter assembled with anodic aluminum oxide microstructures
Keywords :
aluminium compounds; anodised layers; integrated optics; micromachining; optical fibre couplers; packaging; Al2O3; MEMS; anodic oxide microstructures; high aspect ratio; low cost passive alignment; micromachined structures; optical splitter; optical waveguides; optoelectronics packaging; patterned structures; Aluminum oxide; Assembly; Costs; Microstructure; Optical devices; Optical fibers; Optical transmitters; Optical waveguides; Packaging; Silicon compounds;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1995. 8th Annual Meeting Conference Proceedings, Volume 1., IEEE
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-2450-1
DOI :
10.1109/LEOS.1995.484847
