Hybrid PLD technique for nitrogen rich CN/sub x/ layers

Author

Jelinek, M. ; Lancok, J. ; Bulir, J. ; Chvostova, D. ; Simeckova, M. ; Perina, V. ; Mackova, A.

Author_Institution

Inst. of Phys., Czechoslovak Acad. of Sci., Prague, Czech Republic

fYear

2000

fDate

10-15 Sept. 2000

Abstract

Summary form only given. In research of proposed superhard /spl beta/-C/sub 3/N/sub 4/ layers with pulsed laser deposition (PLD) technique a problem arises of how to reach high nitrogen content in layers. Using PLD only, N/C ratio usually does not exceed values of 0.5-0.7. In our new deposition arrangement, in which PLD is combined with additional radiofrequency (13 56 MHz, 300 W) and hollow cathode discharges for nitrogen excitation, an N/C of around 1 was reached.

Keywords

carbon compounds; energy gap; microhardness; pulsed laser deposition; stoichiometry; vapour deposited coatings; wear resistant coatings; 13.56 GHz; 300 W; C/sub 3/N/sub 4/; CN; RF discharges; high nitrogen content; hollow cathode discharges; hybrid PLD technique; microhardness; nitrogen excitation; nitrogen rich CN/sub x/ layers; optical gap; pulsed laser deposition; stoichiometry; superhard layers; Electrons; Ion emission; Kinetic energy; Laser ablation; Laser excitation; Nitrogen; Optical pulses; Plasma temperature; Surface charging; Surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe, 2000. Conference Digest. 2000 Conference on

Conference_Location

Nice

Print_ISBN

0-7803-6319-1

Type

conf

DOI

10.1109/CLEOE.2000.910373

Filename

910373