Title :
New method for monitoring of analogue processes-evaluation of the impact of metalisation on the performance of precise analogue resistors
Author :
Pergoot, A. ; Cox, P. ; Vercruysse, P. ; Wuyts, I. ; Raes, P.
Author_Institution :
Alcatel Mietec, Oudenaarde, Belgium
Abstract :
The high-ohmic polycrystalline (HIPO) resistor is one of the basic devices used in analogue-digital designs. The requirements for accuracy, voltage and temperature linearity, and matching performance are very high. On the other hand, from the process point of view, this is one of the least controlled devices, whose properties depend on all subsequent temperature steps and layers in the backend process. In addition, the surroundings and the topology influence the characteristics of this resistor. By using a new test structure and method, we are able to characterise the dependence of the HIPO parameters on process changes and topology as it appears in the real ASIC. In this paper, we report the most important impact we have discovered, that of metal lines placed in parallel with the HIPO resistors. Different metalisation schemes are compared with regard to the effect on the analogue characteristics of the HIPO resistor
Keywords :
integrated circuit design; integrated circuit interconnections; integrated circuit metallisation; integrated circuit testing; integrated circuit yield; mixed analogue-digital integrated circuits; monitoring; network topology; production testing; resistors; ASIC; HIPO parameters; HIPO resistor; analogue characteristics; analogue process monitoring; analogue resistor performance; analogue resistors; analogue-digital designs; backend process layers; high-ohmic polycrystalline resistor; matching performance; metal lines; metallisation effects; metallisation schemes; temperature linearity; temperature steps; test structure; topology; voltage linearity; Automatic control; Circuit testing; Current measurement; Force measurement; Life testing; Monitoring; Probes; Resistors; Switches; Voltage measurement;
Conference_Titel :
Microelectronic Test Structures, 1998. ICMTS 1998., Proceedings of the 1998 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
0-7803-4348-4
DOI :
10.1109/ICMTS.1998.688026
